AERA PI-980 SERIES

With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.

FEATURES

• Pressure-insensitive operation
• High accuracy and repeatability Integrated gas panel components
• Live gas certified, multi-gas, multi-range configuration
• Field programmable
• DeviceNet, RS-485, and analog control
• All-metal seals and ultra-pure design

BENEFITS

• Improved gas delivery performance and production yields
• Easy integration on tool
• Substantial gas panel cost savings
• Reduced gas panel foot print
• Real-time communication and control
• World-class service and support